BIRD 4421b 电路图.pdf

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1、INSTRUCTION BOOK THRULINE RF POWER METER MODEL 4421 AND THRULINE DIRECTIONAL RF POWER SENSORS 4020 SERIES, 4027A SERIES, 4027F SERIES, AND 4028 SERIES Bird Electronic Corporation 30303 Aurora Road Cleveland (Solon), Ohio 44139 Sales see Chapter 6 Avail- able Connectors, page 59 for a complete list.

2、Since the accuracy is critically dependent on the connectors used at calibration, do not remove or change the connectors. 4020 Series Bird 4020 Series Power Sensors are designed for lab or field use and are accu- rate to within 3%(1) of reading. Figure 1 Bird 4421 Meter Outline Drawing1.Operating Pu

3、sh Buttons 2.LCD 3.ON/OFF Push Button 4.Handle 5.Central Button 6.Fuse Access Door 7.AC Line Module 8.Master ON/OFF Switch 9.GPIB connector 10. GPIB DIP switches 11. RS-232 connector 12. RS-232 DIP switches 13. Power Sensor Socket REMOVE AC POWER BEFORE ATTEMPTING TO SERVICE THIS INSTRUMENT VOLTAGE

4、115/230 V FUSE RATING T630mA/T315mA FREQUENCY 50/60 Hz MAXIMUM POWER 60W AC SUPPLY ON O OFF I POWER SENSOR REAR 6 7 8 910 13 12 11 12-1/4” (312 mm) 4 5 SIDE 10-1/8” (257 mm) 4-1/4” (108 mm) 123 FRONT MODEL 4421 RF POWER METER AUTO RANGE UP DOWN SWRRFLFWDMINMAXdBmLIGHTON / OFF CAUTION Changing the se

5、nsors connectors will invalidate calibration data, and may reduce the maximum power rating of the unit. Introduction 3 4027A Series Bird 4027A Series Power Sensors are designed for use in semiconductor pro- cessing and calibration applications. Stringent calibration provides long-term unit-to-unit r

6、epeatability, allowing consistent amounts of RF energy to be applied to the etch process over many etch cycles. 4027A Sensors are accurate to 1%(1) at specified calibration frequencies and power levels. 4027F Series Bird 4027F Series Power Sensors are similar to the 4027A series. However, additional

7、 filtering allows the 4027F to ignore harmonics of the signal being measured. The 4027F is also less sensitive to AM components of the signal. 4027F Sensors are accurate to 1%(2) at specified calibration frequencies and power levels. 4028 Series Bird 4028 Series Power Sensors are high power sensors

8、otherwise similar to the 4027A series. 4028A sensors are based on a 7/8” line, 4028B sensors use a 1-5/8” line, and 4028C sensors use a 3-1/8” line. 4028 Sensors are accurate to 2% at specified calibration frequencies and power levels. Figure 2 Power Sensor Outline Drawing, 4020, 4027A, 4027F, and 4

9、028A Series DIRECTIONAL POWER SENSOR MODEL 4022 0.3 - 1000 WATTS 25 - 1000 MHz 3-3/4” (95 mm) 3/4” (19 mm) 1-3/8” (35 mm) 2-1/2” (64 mm) 3-1/4” (83 mm) -CAUTION- SOURCELOAD SENSOR PLUG SOCKET Figure 3 Power Sensor Outline Drawing 4028B Series only SENSOR PLUG SOCKET 3.75 (96 mm) 4.75 (121 mm) 3.5 (8

10、9 mm) 6.75 (172 mm) SOURCELOAD Bird 4421 RF Power Meter 4 Figure 4 Power Sensor Outline Drawing 4028C Series only Introduction 5 Frequency and Power Ranges 4020 Series 4027A Series 4027F Series ModelFrequency RangeRF Power Range 40211.8 32 MHz300 mW 1 kW 402225 1000 MHz300 mW 1 kW 40241.5 32 MHz3 W

11、10 kW 4025100 kHz 2.5 MHz3 W 10 kW 4027A250K250 400 kHz3 W 10 kW 4027A400K400 550 kHz3 W 10 kW 4027A800K800 950 kHz3 W 10 kW 4027A2M1.5 2.5 MHz3 W 10 kW 4027A4M3 5 MHz3 W 10 kW 4027A10M10 15 MHz3 W 10 kW 4027A12M10 15 MHz300 mW 1 kW 4027A25M25 30 MHz3 W 9 kW 4027A35M35 45 MHz3 W 7.5 kW 4027A60M45 65

12、 MHz3 W 6 kW 4027A100M95 105 MHz3 W 5 kW 4027A150M150 170 MHz3 W 4 kW 4027F2M1.8 2.2 MHz100 W 10 kW 4027F10M12 15 MHz100 W 10 kW 4027F60M57 63 MHz100 W 3 kW Bird 4421 RF Power Meter 6 4028 Series 4028A250K250 400 kHz1 kW 20 kW 4028A400K400 550 kHz1 kW 20 kW 4028A2M1.5 2.5 MHz1 kW 25 kW 4028A3M2.5 3.

13、5 MHz1 kW 25 kW 4028A4M3.5 4.5 MHz1 kW 25 kW 4028A10M10 15 MHz1 kW 25 kW 4028A25M25 30 MHz1 kW 25 kW 4028B3M2.5 40 MHz1 kW 25 kW 4028B10M10 15 MHz1 kW 25 kW 4028C10M10 15 MHz500W 50 kW 7 Chapter 2Installation This chapter provides information about preparing the Bird 4421 for use. Sensor Connection

14、1.Turn OFF the ON/OFF rocker switch on the meters rear panel. 2.Align the latch on the cable with the notch of the “Power Sensor” socket on the power meters rear panel. 3.Insert the cable until it clicks into place. 4.Connect the other end of the sensor cable to the sensor. RF Line Connection Connec

15、t the end of the power sensor labeled “SOURCE” to the RF source. Con- nect the end labeled “LOAD” to the load or antenna. Reversing these connec- tions will cause measurement errors. CAUTION Changing the sensors connectors will invalidate calibration data, and may reduce the maximum power rating of

16、the unit. CAUTION The Bird 4421 must be powered off when connecting or disconnecting the power sensor from the power meter. WARNING Never attempt to connect or disconnect RF equipment from the transmission line while RF power is being applied. Leaking RF energy is a potential health hazard. CAUTION

17、Do not use the power sensor with a load VSWR greater then 2:1. Damage to the power meter, power sensor, or the RF power source could occur. Bird 4421 RF Power Meter 8 Panel Mounting the 4421 Power Meter You can install the 4421 Power Meter in an equipment rack if you have the optional panel mount ki

18、t (refer to Optional Accessories, page 1). The panel mount kit includes complete installation instructions. Figure 5 shows the overall dimensions and mounting points for a 4421 Power Meter installed in a panel mount kit. ? Note:The power supply interrupt switch for the 4421 Power Meter is located on

19、 the rear panel. When you install a unit in a panel mount kit, you need to provide a means to interrupt the power supply that is easily accessible to the user (such as a switch mounted in the panel). Figure 5 Panel Mounting Dimensions RF POWER METER dBmMAXLIGHTSWRMINRFL 4421 FWD SENSOR POWER 178 - 2

20、64 VAC VOLTAGE 100 - 132 VAC AT 47.5 - 66 Hz MAXIMUM POWER 15W REMOVE AC POWER BEFORE ATTEMPTING TO SERVICE THIS INSTRUMENT. W A R N I N G T .125A, 250V T .250A, 250V FUSE AC SUPPLY O OFF FUSE I ON POWER SENSOR Installation 9 Handle Operation The handle on the Bird 4421 can be set to four different

21、positions (see Figure 6). To adjust the handle, press the center buttons on both sides. Releasing the buttons will lock the handle into position. 115/230V AC Input Power The internal power supply can operate at 115 VAC or 230 VAC. There is no user setting to select the input voltage because the powe

22、r supply automati- cally senses the input voltage. However, you must make sure that you have the correct power cord plug and fuses installed for the line voltage you are using (refer to Replacing Fuses, page 46). AC Line Connectors To make the ac line cord compatible with non-U.S. voltages, users mu

23、st install the appropriate connector on the power cord. Figure 6 Handle Positions Bird 4421 RF Power Meter 10 11 Chapter 3Operating Instructions This chapter describes operator controls and indicators on the Bird 4421 RF Power Meter. For remote operation using a GPIB or RS-232 controller, refer to t

24、he instructions in Chapter 4 or Chapter 5 respectively. Push Button Functions Figure 7 Push Buttons LISTEN TALK LOCAL LOCKOUT FWD AUTO LO BAT REMOTE MODEL 4421 RF POWER METER AUTO RANGE UP DOWN SWRRFLFWDMINMAXdBmLIGHTON / OFF MW nW KW W W mW dBm FWD RFL SWR Push ButtonDescription FWD, RFLPress to me

25、asure forward or reflected RF power. FWD or RFL indicator and current unit of measure turn on. SWRPress to measure standing wave ratio. SWR indicator turns on. Value displayed will be between 1.0 and 199.9 MIN, MAXUsed after pressing FWD, RFL, SWR, or dBm. Displays the minimum (maximum) measured val

26、ue of the previous function as long as MIN (MAX) is held down. dBmUsed after pressing FWD or RFL. dBm indicator turns on. Power is displayed in dBm units. Used after pressing SWR. Return loss is displayed. LIGHTPress to turn on or turn off the displays backlight. If left on, the light automatically

27、shuts off after 30 minutes. AUTOPress to automatically set the scale. AUTO turns on. UP, DOWNPress to select the next higher (lower) scale. If the scale is too high for the power sensor, an error will be displayed. Used while AUTO indicator is on. Stops automatic scaling. AUTO indicator turns off. O

28、N/OFFPress to turn the power meter on or off. This switch will not work if the master power switch on the rear panel is OFF. The display flashes for about 30 seconds when the unit is first turned on. Bird 4421 RF Power Meter 12 Error Codes The Bird 4421 displays error codes when the RF power is eith

29、er below the selected range (underrange) or above the selected range (overrange). Figure 8 displays the error codes and Figure 9 lists the function limits. Audible Warning If the RF power level exceeds 120% of the power sensors maximum power capability, the power meter will sound a warning buzzer. F

30、igure 8 Error Codes SymbolExplanation Value greater than overrange limit of function Value less than underrange limit of function Figure 9 Function Limits FunctionLimitError FWD, RFLPower 199.9% of full scale or 120% of top range Overrange FWD dBm, RFL dBm Power 120% of full scale Power 3% of low ra

31、nge Overrange Underrange SWRFWD 20% of low range FWD RFL = 0 Underrange Overrange Return LossFWD 20% of low range RFL 40 dB Underrange Underrange Underrange 13 Chapter 4IEEE-488 GPIB Interface This chapter discusses setup of the IEEE-488 interface feature and describes the IEEE commands that apply t

32、o the Bird 4421. Operators should under- stand IEEE standard 488-1978 and have basic computer programming skills before attempting to write any programs. Description The Bird 4421 IEEE-488 (GPIB) interface has an eight-position DIP switch that sets operational conditions and interface addresses. The

33、 bottom line of the display indicates the current bus status. Cable Connector The interface uses a standard IEEE-488 cable connector. Pin assignments are listed in Figure 10. CAUTION During remote operation, periodically monitor the bus service request line. Failure to detect a service request could

34、 result in equipment damage. Figure 10 IEEE-488 Pin Assignments PinDesignationType 1D101Data 2D102Data 3D103Data 4D104Data 5EOIManagement 6DAVHandshake 7NRFDHandshake 8NDACHandshake 9IFCManagement 10SRQManagement 11ATNManagement 12SHIELDGround 13D105Data 14D106Data 15D107Data 16D108Data 17RENManagem

35、ent 18GROUNDGround 19GROUNDGround 20GROUNDGround 21GROUNDGround 22GROUNDGround 23GROUNDGround 24GROUND, LOGICGround Bird 4421 RF Power Meter 14 Interface Capabilities The interface capability function codes are listed in Figure 11. Indicators The bottom line of the power meters display shows indicat

36、ors describing the status of the Bird 4421 when used with the IEEE interface. These are: REMOTE: When REMOTE is displayed, the power meter is being controlled through the interface. Measurements, units of measure, and certain other parameters may be changed from a remote location. LISTEN: When LISTE

37、N is displayed, the power meter is receiving data. TALK: When TALK is displayed, the power meter is transmitting data. This is always shown when the unit is in “talker-only” mode. LOCAL LOCKOUT: When LOCAL LOCKOUT is displayed, the push but- tons are disabled and the power meters functions are being

38、 remotely con- trolled. Figure 11 IEEE-488 Interface Module Capabilities CodeNameDescription SH1Source Handshake Can handshake data or command bytes when the unit is acting as a source. AH1AcceptorCan handshake the bus when it is acting as the acceptor of data or commands. T5TalkerCan send data over

39、 the bus to other devices. This capability exists only after the instrument has been addressed to talk, or after a reading in talk-only mode. L4ListenerCan receive device-dependent data over the bus. This capability exists only after the unit has been addressed to listen. SR1Service RequestCan reque

40、st service from the controller. RL1Remote-LocalCan be placed in remote or local mode. PP0Parallel PollDoes not have parallel polling capability. DC1Device ClearCan be reset to factory settings. DT1Device TriggerCan have its readings triggered. C0ControllerDoes not have controller capability. E1Bus D

41、river TypeHas open-collector bus drivers. TE0Extended TalkerDoes not have extended talker capability. LE0Extended ListenerDoes not have extended listener capability. IEEE-488 GPIB Interface 15 Setup Dip Switch Set the interface to ADDR (Addressable) by positioning DIP switch 1 to ON. This makes the

42、4421 respond to controller commands. ? Note:There are several button styles on DIP switches (slide, rocker, lever). Examine the DIP switch to determine the ON and OFF positions. Set the primary address using the DIP switches. The primary address is fac- tory set to 6, but can be set to any value bet

43、ween 1 and 31 (0 is reserved for the controller) To set the primary address, turn OFF switches 4 8 so that the sum of the bits turned off equals the desired primary address. In Figure 12 below, the address is set to 6 (the off switches have values of 4 and 2). ? Note:The primary address is used by t

44、he controller to refer to specific devices on the bus. When programming the controller, the address in the pro- gram must be the same as the address set on the interface module. Each device on the bus must have a different primary address. Talker-Only Mode The Bird 4421 can be set up for manual oper

45、ation while automatically sending data to an output device (Talker-Only Mode). To do so, turn DIP switch 1 OFF and cycle the power. TALK will be displayed. In Talker-Only mode, pressing a button on the meter triggers a measurement. When the measurement is complete, the information is sent to the bus

46、 and LISTEN turns on momentarily. A listen-only device on the bus, such as a printer, can read the value. The power meter is then ready to accept another button press. Command Syntax The Bird 4421 accepts two types of commands. General bus commands are commands, such as Device Clear (DCL), that appl

47、y to any IEEE interfaced device. Device-dependent commands are specific to the 4421. Figure 12 IEEE Interface Default DIP Switch Settings Bird 4421 RF Power Meter 16 If an invalid command is sent to the unit, an error condition is placed in the serial poll byte and the offending command is not execu

48、ted. A group of device-dependent commands can be sent as a single string as long as like command categories are not repeated, for example: “PNFCFDT3TRG”. This string sets up the 4421 to send no prefixes, read forward dBm, make one reading on “TRG”, and triggers a measurement. ? Note:Commands can be

49、entered in either upper or lower case. ? Note:Only the last command entered of each category will be executed. As a command string is processed by the 4421, each category of command is stored in a separate location. Two commands of the same category will be stored in the same location, so that the second will overwrite and erase the first one. General Bus Commands The general bus commands supported by the IEEE-488 interface feature are listed in Figure 13. The syntax