KEI 595 Quick Reference Guide 电路图.pdf

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1、Model 595Quasistatic CV Meter Quick Reference Guide A G R E A T E RM E A S U R E O F C O N F I D E N C E Specifications are subject to change without notice. All Keithley trademarks and trade names are the property of Keithley Instruments, Inc. All other trademarks and trade names are the property o

2、f their respective companies. Keithley Instruments, Inc. 28775 Aurora Road Cleveland, Ohio 44139 440-248-0400 Fax: 440-248-6168 1-888-KEITHLEY (534-8453) Copyright 2000 Keithley Instruments, Inc. Printed in the U.S.A. 04/2001 Model 595Quasistatic CV Meter Quick Reference Guide A G R E A T E RM E A S

3、 U R E O F C O N F I D E N C E Specifications are subject to change without notice. All Keithley trademarks and trade names are the property of Keithley Instruments, Inc. All other trademarks and trade names are the property of their respective companies. Keithley Instruments, Inc. 28775 Aurora Road

4、 Cleveland, Ohio 44139 440-248-0400 Fax: 440-248-6168 1-888-KEITHLEY (534-8453) Copyright 2000 Keithley Instruments, Inc. Printed in the U.S.A. 04/2001 595-903-01A 2UP Covers 2/19/03 2:02 PM Page 1 RadioFans.CN 收音机爱 好者资料库 INTRODUCTION This reference and programming guide contains condensed specifica

5、tions, descriptions of the various features and in- formation for using the Model 595. Also, IEEE-488 program- ming information and several example programs written for commonly used controllers are also included to get the Model 595 up and running on the bus. The Model 595 Quasistatic CV Meter meas

6、ures capacitance using a unique feedback charge method. This method cor- rects capacitance readings for background leakage current. A built-in IEEE-488 interface, plotter driver and labeled grid program enable the Model 595 to plot IV or quasistatic CV curves for a variety of semiconductor materials

7、 and components. 01986, Keithley Instruments, Inc. Instrument Division Cleveland, Ohio, U.S.A. Document Number: 595-903-01 Rev. A 1 RadioFans.CN 收音机爱 好者资料库 TABLE OF CONTENTS CONDENSED SPECIFICATIONS . 3 MODEL 595 FEATURES . 7-20 FRONT PANEL PROGRAMS . 21-26 MEASUREMENT CONNECTIONS . 29-34 IEEE PROGR

8、AMMING . 35-49 PROGRAMS . 50 IBM PC or XT . 51 Applell . 53 HP85 . 55 HP9816 . 57 HP9825A . 59 DEC El 11 . 61 PETICBM 2001 . 63 2 RadioFans.CN 收音机爱 好者资料库 CONDENSED SPECIFICATIONS CAPACITANCE Maximum Allowable W t at Half Range C Reso- (1 bar) 18-28OC Delay Time=O.Oirsec Accuracy Range lution +(%rdg+

9、counts) Step V=O.lV 200pF lOfF 1.0 + 10 9O.OOOpA 2nF lOOfF 0.8 + 2 0.900nA 20nF OF 0.6 + 2 9.000nA *Exclusive of noise, for Step V 2 0.05V and Delay Time 5 one second. CURRENT Temperature Accuracy Coefficient Reso- (1 Bar) 18-28OC 0-18OC active current limit at 4mA. ANALOG OUTPUTS C,l OUTPUT LEVEL:

10、1V represents 10,000 display counts VOLTAGE OUTPUT LEVEL 1V represents 1OV on voltage MAXIMUM OUTPUT VOLTAGE: k2V. on X1 gain; 1000 display counts on X10 gain. source output. GENERAL MAXIMUM INPUT: 30V peak, DC to 60Hz sine wave. MAXIMUM COMMON MODE VOLTAGE 30V maximum, DC to 60Hz sine wave. ENVIRON

11、MENT: Operating: Oo to 4OoC, relative humidity 70% non-condensing up to 35OC. Storage: -25O to 65OC. WARM UP 2 hours to rated accuracy except input bias current ( 10fA after 2 hours, 5fA after 8 hours, at 23OC) POWER 105-125V or 210-250V (internal switch selected). 50Hz to 60Hz. 15VA max. 90-11OV an

12、d 180-220V ver- sion available upon request. 4 The following safety precautions should be observed before using this product and any associated instrumentation Al- though some instruments and accessoria would normally be used with non-hazardous voltages, there are situations where hazardous conditio

13、ns may he. present. This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and fol- low a l l installation, operation, and maintenance information carefully before using the product. Ref

14、er to the mauual for complete product specificatiom. If the product is used in a manner not specified, the protec- tion provided by the product may be impaired. The types of product usen are: Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuri

15、ng t h a t the equipment is operated w i t h its specifcations and operating l i m i t s , and for ensuring t h a t operators are adeqately trained. Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument. They must b

16、e protected from electric shock and contact with hazardous live Circuits. Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or replacing collsumable materials. Maintenance procedms are described in the manual. The pro

17、cedures ex- plicitly state if the operator may perform them. othenvise, they should be performed only by service personnel. Service personnel are trained to work on live circuits, and perform safe installations and repairs of products. Only properly trained service personnel may perform installation

18、 and service procedws. Keithley products are designed for use with electrical sig- nals that are rated Installation Category I and Installation 5/02 Category II, as described in the International Electrotechni- cal Commission (EC) Standard IEC 60664. Most measure- ment, control, and data YO signals

19、are Installation Category I and must not be directly connected to mains voltage or to voltage sources with high transient over-voltages. I n s t a l l a - tion Category II connections qubt protection for high transient over-voltages often associated with local AC mains connections. Assume a l l meas

20、uremenf control, and data YO COMCOUS are for connection to Category I sources unless otherwise marked or described in the Manual. Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The American National Standards Institut

21、e (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak, or 6OVDC are present. A good safety practice i s t o expect that hazardous voltage is present in any unknown circuit before meamring. Operators of this product must be protected f r o m electric shock a

22、! all times. The responsible body must ensure that operators are prevented access and/or insulated f r o m every connection point. In some cases, connections must be ex- posed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the r i s k

23、of electric shock. If the circuit is capable of operat- ing at or above loo0 volts, no conductive part of the cir- cuit maybe exposed. Donot COMect switching cards directly to lmlialite4lpowercir- cuits. They are intended to be used witb impedance limited sources. NEVER connect switching cards direc

24、tly to AC mains. When connecting s o - to switch cards, install proteCrive devices to limit fault CUlTent and voltage to the c a r d . Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting cables, test leads, and jumpers

25、for possible wear, cracks, or breaks before each use. When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main in- put power disconnect device must be provided, in close prox- i m i t y to the equipment and w i t h i n easy reach of the oper

26、ator. For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test ALWAYS remove power from the enfire test sys- tem and discharge any capacitors before: connecting or dis- connecting cables or jumpers, installing or removing sw

27、itching cards, or making internal changes, such as install- ing or removing jumpers. Do not touch any object t h a t couldpruvide acurrent path to the common side of the circuit under test or power line (earth) ground. Always make measllrements with dry hands while standing on a dry, insulated slnfa

28、ce capable of withstanding the voltage bkng measured The instrument and accessories must be used in accordance with its specifications and operating instructions or the safe- ty of the equipment may he impaired. Do not exceed the maximum signal levels of the instruments and accessories, as defined i

29、n the specifications and operat- ing information, and as shown on the instrument or test fix- t u r e panels, or switching card. When fuses are used in a product, replace with same ty-pe and rating for continued protection against fire hazard. Chassis connections must only be used as shield connec-

30、tions for measuring circuits, N(TT as safety earth ground connections. If you are using a test fixture, keep the lid closed while pow- er is applied to the device under test. Safe operation requires the use of a lid interlock. If orb ispresent,connectittosafetyearthgromd using the wire recommended i

31、n the user documentation. The A symbol on an instrument indicates that the user should refer to the operating instructions located in the man- ual. The A symhol on an instrument shows that it can source or measure lo00 volts or m m , including the combined effect of normal and common mode voltages.

32、U s e standad safety pmtions to avoid personal contact with these voltages. The WARNING heading in a manual explains dangers that might result in personal injury or death. Always read the as- sociated information very carefully before performing the indicated procedure. The CAUTION beading in a manu

33、al explains hazards that could damage the instrument. Such damage may invalidate the warranty. Instrumentation and accessories shall not be connected to humans. Before performing any maintenance, disconnect the line cord and a l l test cables. To maintain protection from electric shock and lire, rep

34、lace- ment components in mains circuits, including the power transformer, test leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, w i t h applicable national safety approvals, may be used if the rating and type are the same. Other components that are not safety rela

35、ted may be purchased from other suppliers as long as they are equivalent to the original component. (Note t h a t selected parts should be purchased only through Keithley Instru- ments to m a i n t a i n accuracy and functionality of the prod- uct.) If you are unsure about the applicability of a rep

36、lacement component, call a Keithley Instruments office for information. To clean an instnunent, use a damp cloth or mild, water b a s e d cleaner. Clean the exterior of the instrument only. Do not a p ply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. produc

37、ts t h a t consist of a circuit board with no case or chassis (e.g., data acquisition board for installation into a computer) should never requhe cleaning if handled according to instructions. If the board becomes con- taminated and operation is affected, the board should be re- turned to the factor

38、y for proper cleaning/servicing. SAFETY PRECAUTIONS 1. Before operation, ground the instrument through a prop- erly earth-grounded power receptacle. 2. Before servicing, disconnect the instrument from the power line and all other equipment. Consult the Model 595 Instruction Manual for service inform

39、ation. 3. Do not touch any terminals while the instrument is turned on or connected to any test equipment. WARNING The maximum common mode input voltage (the voltage between input low and chassis ground) is 30V peak. Exceeding this value may create a shock hazard. CAUTION The maximum voltage between

40、 input high and input low is 30V peak. Exceeding this value may cause damage to the instrument. Current inputs that exceed 3mA may be erroneously displayed as an on-scale reading. 5 DISPLAY MESSAGES Message OFF dc A1 l?=S P.=O P.=C OL triG bErr nErr tErr r.r. r.0. *.*I. *I.*. Description Voltage sou

41、rce is OFF (0.OOV ?O.OlV) and Model 595 is set to measure capacitance. Voltage source is set to DC waveform and Model 595 is set to measure capacitance. Software revision level; displayed as part of diagnostics. Troubleshooting diagnostics: Phases: signal, zero and calibration reference. Overload (o

42、verrange input applied); -0L for negative value. Instrument is waiting for a trigger (bus, external, or front panel SHIFT, then ?I. Bus Error: Instrument programmed while not in remote; or illegal command or com- mand option sent. Number Error: Calibration, voltage source, waveform parameter, or pro

43、gram value beyond allowable range. Trigger Overrun Error: Instrument triggered during a measurement conversion. RAM Test Failure: ON while RAM memory is being tested. If message remains, the test failed. ROM Test Failure: ON while ROM memory is being tested. If message remains, the test failed. Flas

44、hing Decimal Points in Exponents: Power up calibration constants are not in use (due to nonvolatile memory error on power up or calibration adjustment without storage). Decimal Points Turned On in Exponent: Calibration program is in use. 6 SHIFT r SHIFT Several of the front panel buttons have a seco

45、ndary func- tion. These functions are labeled in yellow, as is the SHIFT button. Secondary functions are selected by first pressing the SHIFT button and then pressing the desired feature but- ton. More information on these secondary functions can be found in the following text. 7 METER Block METER R

46、ANGE I SUPPRESS ZERO CHECK CORR I ClCo STORE Co MEASUREMENT FUNCTIONS CURRENT The CURRENT button places the Model 595 in the current measurement function. Any one of eight ranges (20pA to 200pA) may be used with this function. 8 OPERATION 1. Enable ZERO CHECK. 2. Press CURRENT function button. 3. Se

47、lect the appropriate range. 4. ZERO CORRect the instrument if it is not reading zero 5. Connect the signal to the rear panel and C . 1 METER 6. Turn ZERO CHECK off. (it is best to do this on the 20pA range). INPUT. CAPACITANCE, Q/t The CAPACITANCE button places the Model 595 in the capacitance measu

48、rement function. There are three capacitance ranges: 20nF. 2nF, and 200pF. OPERATION 1. Enable ZERO CHECK. 2. Press CAPAClTANCE button. 3. Select the desired range. 4. Connect the device to be measured between the rear panel VOLTAGE SOURCE OUTPUT and C,I METER INPUT. 5. Turn ZERO CHECK off. Qlt displays the current flowing through the device at the end of the delay time. Note: the capacitance functio